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Frontier Semiconductor

Rapid Process Optimization Metrology

Frontier Semiconductor, Inc, (FSM), offers a range of advanced metrology products and solutions for semiconductor, LED, Solar, FPD, Data Storage and MEMS applications. We have over 25 years experience in stress measurement, film adhesion testing, wafer topography metrology, and electrical characterization. Our latest offerings include unique technology to meet the metrology needs of 3DIC manufacturing. We have shipped our first 450mm wafer tools.

Applications & Technologies

Management driven by Customer satisfaction offers the Best-Known-Method in our customized metrology solutions.
Partnership with major OEMs to enable 300mm and 450mm eco-system and to align with fabs' cost reduction initiative.

Series

  • 900 Series

    Stress Hysteresis in vacuum or gas up to 900C for the study of annealing cycles.
    Thermal Desorption, Film Shrinkage, Reflectivity, and Resistivity options provide additional insight to causes of material changes with temperature.

    Model: 900TC-VAC | 900C2C |

  • 500 Series

    Stress Hysteresis Measurement up to 500C for thermal property and stability tests of thin films in air.
    Non-Contact Laser Scanning Technology.

    Model: 500TC |

  • Aeto-Tech

    Port testing.

    Model: Aeto-Tech |

  • 413 Series

    Substrate Thickness, Warp, and TTV Measurement
    - with or without Tape
    - for Wafer Backgrind and Etch Thinning processes.
    Non-contact Echoprobe Technology.
    Thin film and surface roughness options.

    Model: 413 SA | 413 EC | 413EC-MOT | 413C2C |

  • 127 Raman

    Local and Lattice Stress Measurement, Die level Topography for in-die and in-device stress and composition control.

    Model: Raman-360 | 127C2C |

  • 128 Series

    Bow and Global Film Stress Measurement.
    Non-contact full wafer stress mapping for semiconductor and flat panel application.
    Dual Laser Switching Technology.

    Model: 128NT | 128L | 128G - 450 | 128L C2C |

  • Adhesion Tester

    Film adhesion testing of thin films and stacks on substrates for material evaluation.

    Model: MELT | Aquaflex |

  • VIT

    NEW: Virtual Interface Technology for 3D-IC Metrology:
    -TSV profile (depth, top & bottom CD, tilt, SWA)
    -Residue Detection
    -RST
    -Copper Nail Height
    -Bump Height and Cu pillar height
    -Edge trim profile

    Model: VIT SA | VIT C2C |

  • Electrical Char

    Full line of front end electrical characterization tools: Sheet Resistance, leakage, and CV-IV measurements.

    Model: 4pp | RsL | EOT |

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Products

21 Product lines... Click here for more details



900TC-VAC 900 Series

300mm chamber. Manually loading.



900C2C 900 Series

300mm fully automated Cassette to Cassette system.



128L 128 Series

Up to 300mm wafer
Rotation Stage.

Contact us

Blue Button
  • North America

    Frontier Semiconductor

    Corporate Head Office

    Tel: +1 408 432 8838
    Fax: +1 408 232 1115
    fsm100@frontiersemi.com

    2127 Ringwood Avenue,
    San Jose CA 95131
  • FSM Europe

    Adrian Cailean

    Sales & Service

    Tel: +33 (0) 676 494 487
    Fax: +33(0)4 76 35 77 61
    adrianc@frontiersemi.com

    196 rue du Rocher de Lorzier, Bât C Centr'Alp, 38430 Moirans, France
  • FSM Korea

    Shawn(Sung-Hyun) Kwon

    Sales & Service

    Tel: +82-31-8015-5458
    Fax: +82-31-8015-5459
    shawnk@frontiersemi.com

    Paragon-II #307, 106-1, Bansong-dong, Hwasung-si, Gyeonggi-do, Korea, 445-811
  • FSM Taiwan

    Alex Cheng

    Sales & Service

    Tel: +886-3-658-7061
    Fax: +886-3-658-9600
    AlexCheng@frontiersemi.com

    Jhubei City, Hsinchu County 302, Taiwan (R.O.C.)
  • FSM China

    Tony Huang

    Sales & Service

    Tel: +862083295780
    Fax: +862083295780
    admin@apolloswing.com

    48 Baqier Rd, Hangyun Plaza 1011, Guangzhou China

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