High Performance, Precise, Innovative liquid and solid precursors Injection / Atomization System for pure liquid compounds and solid ones dissolved in a carrier liquid (organic solvent).

The ATOKIT is able to handle and atomize most of liquid compounds and solutions from low viscosity to high viscosity ones.

The ATOKIT achieves a very fine atomization of a pulsed liquid mixed with a carrier gas prior to injection.

The ATOKIT achieves a very fine atomization of a pulsed liquid mixed with a carrier gas prior to injection. The generated aerosol can be used for Spray Pyrolysis processes. It can also be easily vaporized to produce reactive gases for the synthesis by ALD and CVD of thin films, nanoparticles and nanoobjects of numerous functional materials such as for instance : dielectrics (low-k and high-k), barrier layers (Ta, Ti and Nb nitrides), ferroelectrics, piezoelectrics, metals (Cu, Pt, Ru, Ir, Rh, Ag, Pd,…), III-V, II-V, chalcogenides, transparent conductive oxides, photovoltaïcs, low friction coatings, hard coatings and superconductors.

Because of its unique proprietary way to deliver and atomize the liquid the ATOKIT is the ideal tool to build a real non-contact flash vaporizer therefore generating particle free vapors.
Indeed, the blasting of the carrier gas/liquid mixture allows generating an aerosol of around 10 microns diameter droplets. Such very small droplets can be easily flash vaporized.

The ATOKIT operates from vacuum to atmospheric pressure.
Thanks to delivering of accurate and stable liquid flows, the ATOKIT delivers accurate and stable aerosol flows.
(see illustration for details)

Flange: CF100mm Heating

Temperature range	up to 280°C
Heating zone	1
Thermocouple	1, K type
Power	400 W (220 VAC or 110 VAC)

System control

• Stand alone 19” 2U rackable ICU (Injector Control Unit)
• ICU controlled from a PC interfaced to the unit by a software (RS485)
• "dll" help files provided to allow for easy interfacing of the ATOKIT on the PC
• ICU controlled from a PLC Via a RS485 port (MODBUS com° protocol), the MODBUS “memory map” is provided to help the customer to interface the ATOKIT on his PLC
• One SubD 37 F to connect the ATOKIT to a PLC (triggers and injectors status)