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VAPBOX 1500
High Performance, Precise, Innovative liquid and solid precursors Delivery and Vaporization System for ALD, CVD, MOCVD, PECVD and all gas phase processes.
The VAPBOX 1500 vaporizes pure liquid compounds and solid ones dissolved in a carrier liquid (organic solvent).
The VAPBOX 1500 is able to handle and vaporize most of solid and liquid compounds including low vapor pressure, thermally labile and viscous ones.
The VAPBOX 1500 provides unmatched performances based on a very fine atomization of a pulsed liquid mixed with a carrier gas prior to injection inside the vaporizer. The generated vapors can be used for the synthesis by ALD and CVD of thin films, nano-particles and nano-objects of numerous functional materials such as for instance : dielectrics (low-k and high-k), barrier layers (Ta, Ti and Nb nitrides), ferroelectrics, piezo-electrics, metals (Cu, Pt, Ru, Ir, Rh, Ag, Pd,…), III-V, II-V, chalcogenides, transparent conductive oxides, photovoltaic, low friction coatings, hard coatings and superconductors.
Because of its unique proprietary way to deliver and atomize the liquid inside the vaporizer the VAPBOX1500 is able to achieve a real non-contact flash vaporization therefore generating particle free vapors.
Indeed, the blasting of the carrier gas/liquid mixture inside the vaporizer allows generating an aerosol of around 10 microns diameter droplets. Such very small droplets can be easily flash vaporized. Competitors’ vaporizers are generating bigger liquid droplets that cannot be flash vaporized and clog the vaporizer.
Up to 2 liquids or solutions can be delivered by separated lines and vaporized inside the VAPBOX 1500 simultaneously or sequentially.
The VAPBOX 1500 operates from vacuum to atmospheric pressure. Thanks to delivering of accurate and stable liquid flows, the VAPBOX 1500 delivers accurate and stable vapor flows.
Technical Specifications
Heating
| Temperature range | up to 280°C |
| Heating zones | 3 |
| Thermocouples | 3, K type (1 control per heating zone) |
| Power | 1650 W (220 VAC or 110 VAC) |
Electrical facilities required
| For heating | 8 A (220 V AC) ; 16 A (110 V AC) |
| For the injectors and the MFMs | 24 V DC: 6 A ; +15 VDC: 1A ; -15 V DC: 1 A |
System control
- Electronic board fixed on the vaporizer frame
- Electronic board controlled from a PC interfaced to the unit by a software (RS485)
- "dll" help files provided to allow for easy interfacing of the VAPBOX 1500 on the PC
- Electronic board controlled from a PLC Via a RS485 port (MODBUS com° protocol), the MODBUS “memory map” is provided to help the customer to interface the VAPBOX 1500 on his PLC
- The VAPBOX 1500 must be power supplied by 24 V DC and, depending on the options selected, the VAPBOX 1500 must also be power supplied by +15V/-15 V DC
- One SubD 37 F to connect the VAPBOX 1500 to a PLC
- Liquid inlets: 1/8” compression type or 1/8" F VCR
- Carrier gas inlets: 1/4" Female VCR
- Vapor outlet: 1/2" Male VCR
- Compatible with Windows XP Pro SP2
- A demonstration version is provided on request
- Low pressure type processes (such as PECVD) compatible vaporizer
- 1 or 2 injection heads per vaporizer
- Devicenet interface
- Power Control Unit (PCU) for heating control
- 19” rackable 4U unit
- If ordered, all the necessary cables for the heating elements and for the thermocouples of the vaporizer are provided
- 4 independent heating zones with PID control : injection heads flange + vaporizer body + vaporizer bottom + vaporizer exhaust (for which the heating resistor is not provided)
- RS 485 MODBUS
- Voltage : 230 V AC or 110 V AC + N + Ground, 50/60Hz
- Power : 2000 W ; Current : 8 A (220 V AC) ; 16 A (110 V AC)
- PROFIBUS DP interface available as an option