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- Advanced Metrology for Rapid characterization of the thermal
mechanical properties of low k dielectric and copper thin films - Leakage Currents in Illuminated Junctions and Biased Transistors
- Doping Metrology for Ultra-shallow Junctions
- Characterization of ultra-shallow junctions using frequency-dependent junction photovoltage and its lateral attenuation
- The Value of In-line, Product Wafer Metrology for Critical Processes.