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1. Metrology Tools
  1. RsL-LDHE – new Low dope & high energy system.
  2. RsL-Solar & MCL – In-line sheet resistance and minority carrier lifetime measurements for solar cell application
  3. 4PP TCR – sheet resistance over temperature up to 500șC
  4. FSM-VideoMic & FSM-InnerVision – Video and x-ray based x-y-z measurement system
2. Process Tools
  1. MIS - Fully automated IC package de-capsulation tool for failure analysis
  2. KEMStream VapBox 500, VapBox 1500 - Ultra clean, clog-free and high efficiency vaporizer for ALD and MOCVD (SiTiO3, HfO2, ZrO2 and other difficult materials). ATOKIT Injection/Atomization System for spray pyrolysis.
  3. Annealsys MC100, MC050, SprayCVD-050 - MOCVD and liquid panel for R&D for up to 4” wafers
3. Utility Tools
  1. Saratoga Data Bantam - GDSII file optimization software package - reduces file size up to 98% for faster file transmission, saving on network bandwidth, no loss of time for decompression and speeds tape-out cycle time
  2. Saratoga Data Flume - network optimization program to speed up data transfer rate up to 100x
  3. SiGlaz IDA™- Intelligent defect analysis software package
  4. ProbeLogics - Probe cards
  5. FSMA DPL Laminator using differential pressure control