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1. FSM Aqua Flex Adhesion tester ( 4 point bend measurements in an Environmental Chamber).
Quantitatively test adhesion of low k, Cu, barrier and other film coatings in ambient or in aqueous solutions. Applications include measuring the effect of Plating solutions, CMP slurry solutions or cleaning on adhesion of low k and Cu interfaces. Adhesion strength of coatings on GaAs, coatings on aerospace, automotive and medical devices may also be studied under different environmental conditions.
2. Non Contact Electrical Measurements :
Rs ( sheet resistance ) Mapping for Implant Monitoring, including USJ, ultra shallow junctions, Epi wafer evaluation, SiGe evaluation