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Lattice Stress/ Micro RAMAN
FSM RAMAN 360 for SOI, SiGe, STI,MEMS

Local Stress, Flatness and Nano-Topography
FSM 127 Imaging Interferometer

Film Stress and Wafer Bow
FSM 128
FSM 128L for 300 mm

Wafer and Membrane Thickness/ Topography
Optical EchoProbe FSM 413

FSMA-VideoMic & FSMA-InnerVision – Video and x-ray based x-y-z measurement system
VIDEO INSPECTION AND MEASUREMENT SYSTEM

The FSMA VideoMic split-axis series provides rapid, non-contact 3-axis coordinate measurement with increased accuracy. This capability allows the user to verify critical dimensions on first articles, production samples, or entire runs. With toleranced reporting, thresholds can be set to enable timely corrections to the process or, when necessary, interruption of production to minimize scrap.

Balanced Linear Motors position the stage accurately, quietly, and quickly. High magnification optics relay the image to a high resolution CCD camera and from there to the frame grabber where our sub-pixeling algorithm permits sub-micron measurements. A magnified view of the feature being measured is displayed on the screen and can be stored with all relevant data or printed on the optional color printer. Once measured, the feature coordinates can be stored, analyzed, and/or exported to other software programs for further in-depth analysis.



FEATURES
  • Advanced metrology software provides a high degree of programming flexibility.
  • Enhanced video edge detection (VED) for selective feature measurement.
  • System has versatile VED tools such as Line width, Circle, Center-of-Mass, and Buffer that speed the measuring process.
  • Transports are driven by sophisticated, no maintenance, balanced linear motors which are close-looped to precision scales in all three axes.
  • X (camera) and Y (product) transports operate independently and are completely supported by friction-free air bearings.
  • Closed-Loop Z-axis permits Z-axis measurement and auto-focusing as well as precision Trackball focusing.
  • The Microsoft Windows environment is used with on-line help to ease training.
  • The high-speed multi-tasking processor permits rapid feature detection and high speed transport control.
  • Network capability is standard. Electronic file or printout of dimensional data, as well as images, is available.
  • The system reports position and size of features, allowing optimization of the user’s fabrication process.
  • Tolerancing to Cartesian, as well as True Position,  LMC, and MMC is provided.
  • Programs can be automatically created from CAD data or by recording steps while manually measuring a part.
  • Large LCD color monitor for display of metrology data and video image.
  • Adjustable ergonomic workstation including a compact control panel and standard keyboard maximizes operator performance.
  • Massive granite base, bridge and bearing ‘ways’ for superior machine stability.
  • High-resolution color camera provides brilliant video image.

SPECIFICATIONS




OPTIONS
  • Programmable LED Quadrangle™ top lights for illumination of surface features.
  • Programmable LED bottom lighting for illumination of edges and thru-holes.
  • Z-Trac Lighting Module provides independent control of incident angle and height for edge enhancement.
  • Renishaw Touch Probe for three axis measurements.
  • Automatic Retracting 4-Position Probe Rack.
  • Automatic Retracting Z-Axis Probe Assembly.
  • Spotter Camera with Magnified, Color View of Touch Probe.
  • Z-axis Laser Probe.
  • Hinged Glass Platen holds flat samples of various thicknesses.
  • 12X Programmable Zoom Lens provides preset calibrated magnifications.
  • Optical Magnifications can be specified from 25X to 2000X to match feature sizes.
  • Color Printer provides archived video images and measurement reports.
  • File Conversion Utilities import and export CAD, artwork, drill, and rout files.
  • Powerful EXCEL based SPC Package.
Frontier News
FSM proudly presents our latest offering:

Non contact resistivity on solar cell

FSM RTH surface roughness profiler

VideoMic and InnerVision

Auto IC de-caper

Resistivity with heat up to 500C

  More...