Optical Measurement Techniques
| Lattice Stress/ Micro RAMAN FSM RAMAN 360 for SOI, SiGe, STI, MEMS |
| Local Stress, Flatness and Nano-Topography FSM 127 Imaging Interferometer |
| Film Stress and Wafer Bow FSM 128 FSM 128L for 300 mm |
| Wafer and Membrane Thickness/ Topography Optical EchoProbe FSM 413 |
| FSMA - VideoMic & FSMA - InnerVision – Video and x-ray based x-y-z measurement system |