Material Characterization
| Integrated Metrology Annealing Chamber |
|---|
Rapid Thermal Mechanical Evaluation of low k, Copper, Barrier, High k, novel materials. |
FSM 900TC-vac series Integrated Metrology System for simultaneous 1) Film Stress Hysteresis Studies 2) Thermal Stability Evaluation 3) Thermal Desorption Spectra 4) Shrinkage Studies 5) Reflectivity Studies 6) Coefficient of Thermal Expansion Measurements |
Features
Fast and Simultaneous multiple metrology on same wafer . Avoids tool to tool and sample variation problems associated with multiple tool sets. |