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Products
Sheet Resistance and Leakage Current
FSM RsL100 Non - Contact Rs, leakage for USJ FSM 4PP
RsL-LDHE – new Low dope & high energy system.
RsL-Solar & MCL – In-line sheet resistance and minority carrier lifetime measurements for solar cell application
4PP TCR – sheet resistance over temperature up to 500oC
Metal Contamination
FSM MC100 for product wafers
Equivalent Oxide Thickness (CV)
FSM EOT - for product wafers
FSM RsL100 Non - Contact Rs, leakage for USJ FSM 4PP
RsL-LDHE – new Low dope & high energy system.
RsL-Solar & MCL – In-line sheet resistance and minority carrier lifetime measurements for solar cell application
4PP TCR – sheet resistance over temperature up to 500oC
Metal Contamination
FSM MC100 for product wafers
Equivalent Oxide Thickness (CV)
FSM EOT - for product wafers
Electrical Measurement Techniques
| FSM RsL100 Sheet Resistance and Leakage Current Mapping Tool |
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| Non-contact Sheet Resistance and Leakage Current Measurements for Implant & Annealing Monitoring for 65 and 45 nm CMOS Technologies |
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Frontier News
FSM proudly presents our latest offering:
Non contact resistivity on solar cell
FSM RTH surface roughness profiler
VideoMic and InnerVision
Auto IC de-caper
Resistivity with heat up to 500C
Non contact resistivity on solar cell
FSM RTH surface roughness profiler
VideoMic and InnerVision
Auto IC de-caper
Resistivity with heat up to 500C