Electrical Measurement Techniques
| FSM introduces the EOT |
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FSM introduces the EOT, a fully automated product wafer monitor for oxide quality and gate oxide stack evaluation. This tool has the ability to simultaneously measure CV characteristics such as effective oxide thickness (EOT), Vfb, Qeff, Dit and a full range of IV information. FSM has a complete line of Fully Automated or Bench top metrology tools available.
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